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Iranian Journal of Electrical and Electronic Engineering، جلد ۸، شماره ۴، صفحات ۲۸۰-۲۸۹
عنوان فارسی
چکیده فارسی مقاله
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عنوان انگلیسی Design and Fabrication of a Narrow-bandwidth Micromechanical Ring Filter using a Novel Process in UV-LIGA Technology
چکیده انگلیسی مقاله This paper presents the design and a new low-cost process for fabrication of a second-order micromechanical filter using UV-LIGA technology. The micromechanical filter consists of two identical bulk-mode ring resonators, mechanically coupled by a flexural-mode beam. A new lumped modeling approach is presented for the bulk-mode ring resonators and filter. The validity of the analytical derivation is investigated using the finite element method by ANSYS software. The new low-cost fabrication process is used to achieve a high aspect ratio of 16 with 3 μm gap spacing. The rigid graphite serves as a low-cost primary substrate and plating base of nickel as structural material. The fabrication process needs only three UV-lithography steps with Mylar masks to fabricate the main structure and pattern the printed circuit board as a secondary substrate. The frequency response of the fabricated filter is characterized as a function of the DC-bias voltage using a fully differential drive and sense interface circuit. The experimental results demonstrates micromechanical filter with center frequency in the vicinity of 10.31 MHz and percent bandwidth less than 0.3% using a DC-bias voltage of 60 V. The detailed fabrication process can be applied as an appropriate low-cost alternative to X-ray LIGA and silicon-based micromechanical filters.
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نویسندگان مقاله a بیجاری | a. bijari
department of electrical engineering, faculty of engineering, ferdowsi university of mashhad fum , 91775-1111, iran.

سازمان اصلی تایید شده: دانشگاه فردوسی (Ferdowsi university)

سید حسین کشمیری | s h keshmiri
department of electrical engineering, faculty of engineering, ferdowsi university of mashhad fum , 91775-1111, iran.

سازمان اصلی تایید شده: دانشگاه فردوسی (Ferdowsi university)

w wanburee | w. wanburee
school of electrical engineering, institute of engineering, suranaree university of technology sut , nakhon ratchasima 30000, thailand


ch sriphung | ch. sriphung
synchrotron light research institution slri , nakhon ratchasima 30000, thailand


r phatthanakun | r. phatthanakun
synchrotron light research institution slri , nakhon ratchasima 30000, thailand
نشانی اینترنتی http://ijeee.iust.ac.ir/browse.php?a_code=A-10-612-3&slc_lang=en&sid=en
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کد مقاله (doi)
زبان مقاله منتشر شده en
موضوعات مقاله منتشر شده 2-Semiconductor Devices
نوع مقاله منتشر شده Research Paper
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